Rotational Transfer Wet Benches

Equipment for Clean Manufacturing

World Class Wet Processing and Clean Room Equipment

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Rotational Transfer Wet Benches

Front-to-Back Carrier Motion	Side-to-Side Carrier Motion	Dual Hoist Configuration, Front-to-Side

Automated Rotational Transfer Acid Processing Station The Acid Processing Station pictured above will simultaneously process multiple loads of silicon wafers through selected heated or ambient temperature chemical baths and rinse tanks. This bench is designed to be used with aqueous chemical processes, which may include Buffered Oxide Etch, Common Oxide Etch, Nitride Etch, or other processes which utilize strong Acid or Alkaline Solutions.

		Programmable Recipes allow Process Versatility
Automated Rotational Transfer Solvent Processing Stations are also available

Features can include:

Turntable load and unload stations

Fully automatic, dual axis closed loop servo transfer hoist maintains extremely accurate position and speed control

Programmable Logic Controller allows multiple processes / recipes

Fully Programmable cycle times is process dependent

Touch screen with overlay protection for programming all hoist positions, speed variables.

Safety Interlocks for Process areas

Data Collection and Storage for processing history, or Statistical Process Control

"Teach Pendant" can be provided for critical hoist/carrier positions

Audible/Visual alarms with light tree along with identification on the operator panel

Tool secured electrical, pneumatic and plumbing access panels

Fire Protection System

DI Water sampling valve

Lockout valves for facility air, nitrogen or bulk-fill chemical inlets

Chiller units may be remotely located up to 25 feet away

Processing for 4, 5, 6 or 8 inch wafers or other materials as required

Deck design is sectional, with electrical quick-disconnects, lip exhaust and drop-in tanks. All facility connections are located at the rear of the bench for easy access

Go to PDF format Catalog Sheet: Rotational Transfer Bench Catalog

It's all about Quality and Experience. You can expect quality in our products, and trust our experience. We use rigid SEMI Standards as our design and construction guidelines, and third-party safety inspections are available for product certifications.

For quick response, please contact us:

E-mail: [email protected] Phone: 972-221-7656 Fax: 972-436-5735

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