Automated Linear Transfer Acid Processing Station

The Acid Processing Station pictured will simultaneously process multiple loads of silicon wafers through selected heated or ambient temperature chemical baths and rinse tanks.  This bench is designed to be used with aqueous chemical processes, which may include Buffered Oxide Etch, Common Oxide Etch, Nitride Etch, or other processes which utilize strong Acid or Alkaline Solutions.

Programmable Recipes allow

Process Versatility

Turntable load and unload stations

Fully automatic, dual axis closed loop servo transfer hoist maintains extremely accurate position and speed control

Programmable Logic Controller allows multiple processes / recipes

Fully Programmable cycle times is process dependent

Touch screen with overlay protection for programming all hoist positions, speed variables.

Safety Interlocks for Process areas

Data Collection and Storage for processing history, or Statistical Process Control

"Teach Pendant" can be provided for critical hoist/carrier positions

Audible/Visual alarms with light tree along with identification on the operator panel

Tool secured electrical, pneumatic and plumbing access panels

Fire Protection System

DI Water sampling valve

Lockout valves for facility air, nitrogen or bulk-fill chemical inlets

Chiller units may be remotely located up to 25 feet away

Processing for 4, 5, 6 or 8 inch wafers or other materials as required

Deck design is sectional, with electrical quick-disconnects, lip exhaust and drop-in tanks.  All facility connections are located at the rear of the bench for easy access

For quick response, please contact us:

E-mail: [email protected]       Phone: 972-221-7656       Fax: 972-436-5735